µXRF, the equipment for material composition analysis

X-ray fluorescence spectroscopy is a method for material composition, layer thickness analysis and elemental analysis of mainly inorganic samples for a wide variety of applications.

XRF is a non-destructive analytical technique used to identify and determine the concentrations of elements present in solid, powdered and liquid samples. Our XRF system is capable of measuring elements from sodium (Na) to uranium (U) at trace levels of typically 50-300 ppm (exact value depends on the element) and up to 100%.

 The XRF spectrometer measures the individual component wavelengths of the fluorescent emission produced by a sample when irradiated with X-rays.
Energy dispersive X-ray fluorescence (EDXRF) is achieved by a liquid Nitrogen cooled Si(Li) crystal, with an energy resolution below 150 eV.

Electronic, geological, mineral, metallurgy, glass, environmental samples, etc. are typically analyzed with this method. Very often, it is necessary to examine inhomogeneous samples like small pollution particles, inclusions or detect materials forbidden by specific markets like lead, cadmium, etc. In this context, it is interesting to have the possibility to generate an excitation beam with a small spot area of a diameter size smaller than 30 µm.


Samples can be in liquid or solid states or in powder form.

This tool offers the possibility to analyze either small samples like single crystals or also inhomogeneity of larger samples with trace detection level down to ppm and in some case down to ppb. Analysis goes from single point measurement to distribution analysis on a matrix (spectral mapping).

New applications of this equipment are found every day. It is more and more frequently used in industry for quality control as well as in R&D departments.